polyimide

Examples

• All

• The critical wiring, which consists of five levels of copper lines with a polyimide dielectric, is deposited on top of this base.

  Academic text (1998)

• The Cu layer is then planarized to the polyimide surface using a proprietary procedure.

  Academic text (1998)

• The depth of the affected areas could be as much as half of the polyimide thickness.

  Academic text (1998)

• The topography in the polyimide above the metal features was removed in the initial stages of polishing.

  Academic text (1998)

• The first polyimide layer, one of whose functions is to planarize the substrate surface, is then applied.

  Academic text (1998)

• After blanket polyimide deposition, vias are opened in the polyimide.

  Academic text (1998)

• For all levels except the first, the starting surface was the planarized polyimide surface of the preceding level with flush, exposed vias.

  Academic text (1998)

• The use of less-reactive polyimide dielectrics to make the cupping layer unnecessary is currently under development.

  Academic text (1998)

• Nonplanar structures can create localized variations in polyimide thicknesses.

  Academic text (1998)

• Polyimide is commonly used in electronics due to its high thermal stability and resistance to chemicals.

Surface Forms

Morphology

Etymology