lithography
- noun
- /lɪˈθɒɡrəfi/
- Specialized
- Rather, electron beam writers are commonly used to produce the masks for optical lithography.
- optical lithography
- soft lithography
- electron lithography
ASML is only able to sell their DUV lithography equipment to China, but not their EUV equipment, which is for the most advanced stuff.
- ASML is only able to sell their DUV lithography equipment to China, but not their EUV equipment, which is for the most advanced stuff.
- Machinery like C and CS like lithography machines for chips.
Examples
-
Now it seems that in both microscopy and lithography, electrons will take over.
Academic text (1997) -
We have shown that high accuracy is achievable with soft lithography, but alignment issues remain a challenge.
Academic text (2001) -
Five years ago, 19, we set out to find an alternative to optical lithography.
Academic text (2001) -
And really therefore, you need lithography and semiconductor growth technologies, which allows us to go to those dimensions.
-
Potentially, there are several physical limitations. Among them is the lithography used to define the patterns on the chip.
Academic text (1997) -
Devices with features as small as 30 nm have been made using electron-beam lithography.
Academic text (1997) -
Advances in optical lithography have continued to meet increasing demands for high-resolution patterning.
Academic text (1998) -
Superior mask-making resists are vital to semiconductor lithography, and over the last thirty years, these materials have advanced significantly.
Academic text (2001) -
Resist systems for use in ArF (193-nm) excimer laser lithography are maturing rapidly.
Academic text (2001) -
Lithography is essential in microfabrication as it transfers intricate patterns onto materials to create integrated circuits.
Synonyms
A print made by a method that uses a flat stone or plate
A process that uses light and photo masks to make tiny patterns on surfaces for things like microchips
Compounds
- Specialized
A way of printing where ink moves from a plate to a rubber sheet, then to paper for many copies
How Fine
- Specialized
- Specialized
- Specialized
Surface Forms
Morphology
lithography = litho + graphy
This microfabrication sense is a specialized extension of the printing term, so most learners cannot recover the meaning from the morphemes alone.
Etymology
The word lithography keeps that idea in computer-chip work: litho- means 'stone' and -graphy means 'writing' (the same -graphy you see in photograph), so it describes 'writing' tiny circuit patterns onto a surface using light and special chemicals.