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lithography

lithography

1 8.1
A process that uses light to put a tiny pattern on a computer chip
  • noun
  • /lɪˈθɒɡrəfi/
  • Specialized
translation icon : litografía
  • Rather, electron beam writers are commonly used to produce the masks for optical lithography.
  • optical lithography
  • soft lithography
  • electron lithography

ASML is only able to sell their DUV lithography equipment to China, but not their EUV equipment, which is for the most advanced stuff.

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Examples

  • Now it seems that in both microscopy and lithography, electrons will take over.

    Academic text (1997)
  • We have shown that high accuracy is achievable with soft lithography, but alignment issues remain a challenge.

    Academic text (2001)
  • Five years ago, 19, we set out to find an alternative to optical lithography.

    Academic text (2001)
  • And really therefore, you need lithography and semiconductor growth technologies, which allows us to go to those dimensions.

  • Potentially, there are several physical limitations. Among them is the lithography used to define the patterns on the chip.

    Academic text (1997)
  • Devices with features as small as 30 nm have been made using electron-beam lithography.

    Academic text (1997)
  • Advances in optical lithography have continued to meet increasing demands for high-resolution patterning.

    Academic text (1998)
  • Superior mask-making resists are vital to semiconductor lithography, and over the last thirty years, these materials have advanced significantly.

    Academic text (2001)
  • Resist systems for use in ArF (193-nm) excimer laser lithography are maturing rapidly.

    Academic text (2001)
  • Lithography is essential in microfabrication as it transfers intricate patterns onto materials to create integrated circuits.

Synonyms

litho
vslithography
  • Jargon
1 7.7

A print made by a method that uses a flat stone or plate

is the specialized microfabrication process using light and photosensitive resist
photolithography
vslithography
  • Specialized
1 9.9

A process that uses light and photo masks to make tiny patterns on surfaces for things like microchips

is broader in scope using light or other radiation and photosensitive resist in microfabrication

Compounds

offset lithography
  • Specialized
6.2

A way of printing where ink moves from a plate to a rubber sheet, then to paper for many copies

How Fine

photolithography
  • Specialized
1 9.9
lithography
  • Specialized
1 8.1
printing
31 1.0
silkscreening
  • Specialized
5.1

Surface Forms

lithography singular
lithographies plural

Morphology

lithography = litho + graphy

This microfabrication sense is a specialized extension of the printing term, so most learners cannot recover the meaning from the morphemes alone.

Etymology

The word lithography keeps that idea in computer-chip work: litho- means 'stone' and -graphy means 'writing' (the same -graphy you see in photograph), so it describes 'writing' tiny circuit patterns onto a surface using light and special chemicals.